JIEAS OPEN ACCESS

Journal of Industrial Engineering and Applied Science

ISSN:3005-608X (print) | ISSN:3005-6071 (online) | Publication Frequency: Bimonthly

OPEN ACCESS|Research Article||3 December 2025

Predictive Maintenance of Semiconductor Equipment Using Stacking Classifiers and Explainable AI: A Synthetic Data Approach for Fault Detection and Severity Classification

Min Yin

University of California-Berkeley

gmiayinc@gmail.com

University of California-Berkeley, 94720, USA.

* Corresponding Author1: Min Yin, E-Mail: gmiayinc@gmail.com

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Journal of Industrial Engineering and Applied Science (JIEAS)
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